Results of the procurement procedure
Legal Basis:
Directive 2014/24/EU
Section I: Contracting authority
I.1)Name and addressesOfficial name: Kungliga Tekniska högskolan
National registration number: 202100-3054
Postal address: Brinellvägen 8
Town: STOCKHOLM
NUTS code: SE11 Stockholm
Postal code: 100 44
Country: Sweden
Contact person: Karin Edoff
E-mail: kedoff@kth.se
Internet address(es):
Main address: http://www.kth.se
I.4)Type of the contracting authorityNational or federal agency/office
I.5)Main activityEducation
Section II: Object
II.1)Scope of the procurement
II.1.1)Title:
Hybrid thin film deposition system
Reference number: V-2021-0401
II.1.2)Main CPV code38000000 Laboratory, optical and precision equipments (excl. glasses)
II.1.3)Type of contractSupplies
II.1.4)Short description:
Purpose of procurement
KTH is seeking tenders for a new hybrid thin film deposition system to be used for micro- and nanostructure fabrication.
The main application of the procured tool will be metallization of microelectronic circuits and hardmasks for etching using photoresist-liftoff techniques, making temperature control vitally important to avoid resist burning. Substrates will be mainly individual chips (possibly up to 80% of the usage) and wafers up to 4’’ diameter (remaining 20%), but with other new purchases and our recent push towards 4’’ processing, this ratio may shift in the near future. As requested by our user base and as a new capability for our lab, the system must come equipped with an ion gun for sample cleaning prior to deposition and low-energy ion-bombardment during evaporation for modified film properties.
II.1.6)Information about lotsThis contract is divided into lots: no
II.1.7)Total value of the procurement (excluding VAT)Value excluding VAT: 775 900.00 USD
II.2)Description
II.2.3)Place of performanceNUTS code: SE11 Stockholm
II.2.4)Description of the procurement:
Purpose of procurement
KTH is seeking tenders for a new hybrid thin film deposition system to be used for micro- and nanostructure fabrication.
The main application of the procured tool will be metallization of microelectronic circuits and hardmasks for etching using photoresist-liftoff techniques, making temperature control vitally important to avoid resist burning. Substrates will be mainly individual chips (possibly up to 80% of the usage) and wafers up to 4’’ diameter (remaining 20%), but with other new purchases and our recent push towards 4’’ processing, this ratio may shift in the near future. As requested by our user base and as a new capability for our lab, the system must come equipped with an ion gun for sample cleaning prior to deposition and low-energy ion-bombardment during evaporation for modified film properties.
II.2.5)Award criteriaPrice
II.2.11)Information about optionsOptions: yes
Description of options:
Extended warranty or service, spare parts, upgrades, ion milling system, related peripheral items
II.2.13)Information about European Union fundsThe procurement is related to a project and/or programme financed by European Union funds: no
II.2.14)Additional information
Section IV: Procedure
IV.1)Description
IV.1.1)Type of procedureOpen procedure
IV.1.3)Information about a framework agreement or a dynamic purchasing system
IV.1.8)Information about the Government Procurement Agreement (GPA)The procurement is covered by the Government Procurement Agreement: yes
IV.2)Administrative information
IV.2.1)Previous publication concerning this procedureNotice number in the OJ S: 2021/S 119-312495
IV.2.8)Information about termination of dynamic purchasing system
IV.2.9)Information about termination of call for competition in the form of a prior information notice
Section V: Award of contract
A contract/lot is awarded: yes
V.2)Award of contract
V.2.1)Date of conclusion of the contract:17/09/2021
V.2.2)Information about tendersNumber of tenders received: 1
The contract has been awarded to a group of economic operators: no
V.2.3)Name and address of the contractorOfficial name: AJA International, Inc.
National registration number: 043493550
Postal address: 809 Country Way
Town: Scituate, MA
NUTS code: US United States
Postal code: 02066
Country: United States
E-mail: topgun@ajaint.com
Internet address: http://www.ajaint.com
The contractor is an SME: yes
V.2.4)Information on value of the contract/lot (excluding VAT)Initial estimated total value of the contract/lot: 775 900.00 USD
Total value of the contract/lot: 775 900.00 USD
V.2.5)Information about subcontracting
Section VI: Complementary information
VI.3)Additional information:
Mercell notice: https://opic.com/id/afmluvkvas
VI.4)Procedures for review
VI.4.1)Review bodyOfficial name: Förvaltningsrätten i Stockholm
Town: Stockholm
Country: Sweden
VI.5)Date of dispatch of this notice:08/12/2021
http://ted.europa.eu/udl?uri=TED:NOTICE:635169-2021:TEXT:EN:HTML&src=0&tabId=2