Machinery & Equipment
Sweden-Stockholm: Laboratory, optical and precision equipments (excl. glasses)
Sweden-Stockholm: Laboratory, optical and precision equipments (excl. glasses) has been closed on 17 Sep 2021. It no longer accepts any bids. For further information, you can contact the Kungliga Tekniska högskolan (202100-3054)
Bellow, you can find more information about this project:
Location: Sweden
Kungliga Tekniska högskolan (202100-3054)
Machinery & Equipment
Closed
13 Dec 2021
17 Sep 2021
775900
Karin Edoff
Contract award notice
Results of the procurement procedure
Supplies
Section I: Contracting authority
Section II: Object
Hybrid thin film deposition system
Purpose of procurement
KTH is seeking tenders for a new hybrid thin film deposition system to be used for micro- and nanostructure fabrication.
The main application of the procured tool will be metallization of microelectronic circuits and hardmasks for etching using photoresist-liftoff techniques, making temperature control vitally important to avoid resist burning. Substrates will be mainly individual chips (possibly up to 80% of the usage) and wafers up to 4’’ diameter (remaining 20%), but with other new purchases and our recent push towards 4’’ processing, this ratio may shift in the near future. As requested by our user base and as a new capability for our lab, the system must come equipped with an ion gun for sample cleaning prior to deposition and low-energy ion-bombardment during evaporation for modified film properties.
Purpose of procurement
KTH is seeking tenders for a new hybrid thin film deposition system to be used for micro- and nanostructure fabrication.
The main application of the procured tool will be metallization of microelectronic circuits and hardmasks for etching using photoresist-liftoff techniques, making temperature control vitally important to avoid resist burning. Substrates will be mainly individual chips (possibly up to 80% of the usage) and wafers up to 4’’ diameter (remaining 20%), but with other new purchases and our recent push towards 4’’ processing, this ratio may shift in the near future. As requested by our user base and as a new capability for our lab, the system must come equipped with an ion gun for sample cleaning prior to deposition and low-energy ion-bombardment during evaporation for modified film properties.
Extended warranty or service, spare parts, upgrades, ion milling system, related peripheral items
Section IV: Procedure
Section V: Award of contract
Section VI: Complementary information
Mercell notice: https://opic.com/id/afmluvkvas
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